FRL (Final filter (Precision filtration and decompression)) < DIGITAL CATALOG Ver.5.0

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Static electricity removing unit

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Constant delivery pump

FRL (Final filter (Precision filtration and decompression))

In-line Filter PLF Series

·Provides more than 10 times the filtering area of flat membrane elements in the same space by using porous hollow fiber membrane elements.
·Long-life device that offers high filtration accuracy is compact yet handles high flow rate.
·Ideal for final filters for blow air such as used in IC manufacturing devices.

Clean Line Filter CLF Series

·The filtration membrane uses a PTFE membrane and PTFE non-woven fabric in a dual-layer structure that assures stable performance; and guarantees a collecting efficiency of 100% for microscopic particles of 0.01mm.
·The component is performed precision cleaning inside of the clean rooms.Because few microscopic particles become adhered to it; a quick response is achieved.

Stainless Regulator RS Series

·Optimum for foodstuff-related lines that require corrosion resistance; and for other lines with non-oil and non-grease requirements for such applications as solvents in liquid crystal and semiconductor-related processes; carrier gas pressure control in clean water circuits; blow pressure control; and clean air and gas pressure control.

Precision Stainless Regulator PRS Series

·Allows high-precision settings (0.001MPa) for carrier gas pressure control; blow pressure control; clean air and gas pressure control; etc.; for all kinds of solvents and clean water circuits used in liquid crystal and semiconductor-related processes.

Precision Stainless Regulator PRS Series