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FRL (Final filter (Precision filtration and decompression)) |
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| In-line Filter PLF Series |
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·Provides more than 10 times the filtering area of flat membrane elements in the same space by using porous hollow fiber membrane elements.
·Long-life device that offers high filtration accuracy is compact yet handles high flow rate.
·Ideal for final filters for blow air such as used in IC manufacturing devices. |
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| Clean Line Filter CLF Series |
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·The filtration membrane uses a PTFE membrane and PTFE non-woven fabric in a dual-layer structure that assures stable performance; and guarantees a collecting efficiency of 100% for microscopic particles of 0.01mm.
·The component is performed precision cleaning inside of the clean rooms.Because few microscopic particles become adhered to it; a quick response is achieved. |
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| Stainless Regulator RS Series |
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| ·Optimum for foodstuff-related lines that require corrosion resistance; and for other lines with non-oil and non-grease requirements for such applications as solvents in liquid crystal and semiconductor-related processes; carrier gas pressure control in clean water circuits; blow pressure control; and clean air and gas pressure control. |
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| Precision Stainless Regulator PRS Series |
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| ·Allows high-precision settings (0.001MPa) for carrier gas pressure control; blow pressure control; clean air and gas pressure control; etc.; for all kinds of solvents and clean water circuits used in liquid crystal and semiconductor-related processes. |
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